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发明名称
Halbleiterwaferstruktur und Herstellungsverfahren dafür
摘要
申请公布号
DE4239457(C2)
申请公布日期
1995.04.06
申请号
DE19924239457
申请日期
1992.11.24
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
IWASAKI, MASANOBU, ITAMI, HYOGO, JP;TSUKAMOTO, KATSUHIRO, ITAMI, HYOGO, JP
分类号
H01L21/301;H01L21/3205;H01L21/74;H01L21/78;H01L23/52;(IPC1-7):H01L27/04;H01L23/50
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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