Capacitive acceleration sensor with free diaphragm.

摘要

The acceleration sensor has a first stationary substrate (1) having a stationary electrode (17u) and a second stationary substrate (2) having another stationary electrode (30 l ) and being opposed to the first stationary substrate (1) with a given spacing. An electrically conductive diaphragm (3) is disposed in the spacing and has a central segment (26) fixed in the spacing through the pair of stationary substrates (1, 2) and a peripheral segment (25m) surrounding around and extending resiliently from the central segment (26) to undergo displacement in the spacing relative to the stationary electrodes (17u, 30 l ) in response to an external acceleration force. The peripheral segment (25m) and the opposed stationary electrodes (17u, 30 l ) form variable capacitors effective to produce a capacitance change in response to the displacement of the peripheral segment (25m) to detect the external acceleration force.