发明名称 |
Cantilever for use with atomic force microscope and process for the production thereof. |
摘要 |
The improved cantilever for use with an atomic force microscope comprises a single-crystal silicon base 11 having adequate mechanical strength, a cantilever beam 12 that is made from a silicon oxide film and which is joined at one end to the base, and a conical stylus 13 with a sharp tip that is formed of single-crystal silicon on the cantilever beam 12 at the other end which is opposite the end joined to the base 11, and all surfaces of the cantilever are covered with a thin electroconductive film 14. If desired, protective plates 15 for protecting the cantilever beam against mechanical damage may be provided that are processed from the base material in such a way that they hold the beam therebetween and which have satisfactory strength. The stylus has an abrupt profile with a sharp tip and a high aspect ratio, and the cantilever beam has an invariable spring constant and supports the stylus at an end. The cantilever can be produced by a process comprising steps (a) - (k). <IMAGE> |
申请公布号 |
EP0646787(A1) |
申请公布日期 |
1995.04.05 |
申请号 |
EP19940115014 |
申请日期 |
1994.09.23 |
申请人 |
EBARA RESEARCH CO., LTD.;DIRECTOR GENERAL, AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY |
发明人 |
ITOH, JUNJI;TOMA, YASUSHI |
分类号 |
G01Q70/10;G01B5/28;G01B7/34;G01B21/30;G01N27/00;G01N37/00;G01Q20/02;G01Q60/38;H01J37/28 |
主分类号 |
G01Q70/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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