| 摘要 |
<p>PURPOSE:To provide the substrate holder with which a uniform and large cooling capacity is obtainable in spite of increasingly large sizing substrate and which is simple to handle and less affects a vacuum device in the event of generation of trouble by improving a heat transmission means between the substrate and a substrate base. CONSTITUTION:This substrate holder is a device to support the substrate 2 and has the substrate base 14 which is cooled by a refrigerant 16, a substrate retainer 18 which presses down the peripheral edge of the substrate 2 toward the substrate base 14 and a cooling pad 20 which is so disposed on the substrate base 14 as to be held between the substrate base 14 and the substrate 2 and is formed by encapsulating grease 24 for vacuum consisting essentially of silicone grease into a flexible bag 22.</p> |
