PRODUCTION OF CRYSTALLINE SILICON NITRIDE POWDER

摘要

PURPOSE:To control the oxygen content of crystalline silicon nitride powder and the distribution of oxygen in the particles and to produce crystalline silicon nitride powder excellent in sintering characteristics with high productivity in large quantities. CONSTITUTION:Amorphous silicon nitride powder and/or crystalline silicon nitride powder obtd. by firing a nitrogen-contg. silane compd. is milled in an atmosphere consisting of 5-40% oxygen and the balance inert. gas or further contg. 0.001-2.0% moisture.