发明名称 |
Positive radiation-sensitive mixture and recording material produced therefrom |
摘要 |
A positive radiation-sensitive mixture is disclosed comprising a compound which forms an acid under the action of high-energy radiation and an acid-cleavable compound, wherein the compound which forms an acid contains aromatically bound chlorine or bromine and has a pKa value of less than about 12 or is a derivative of a compound having such a pKa value. The mixture and the recording material produced therefrom have a relatively high-sensitivity and improved resolution and, in addition, exhibit no scumming after development.
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申请公布号 |
US5403697(A) |
申请公布日期 |
1995.04.04 |
申请号 |
US19920881329 |
申请日期 |
1992.05.07 |
申请人 |
HOECHST AKTIENGESELLSCHAFT |
发明人 |
DOESSEL, KARL-FRIEDRICH;DAMMEL, RALPH;LINGNAU, JUERGEN |
分类号 |
G03C1/72;C07C39/367;C07C43/225;C07C43/313;C07C43/315;G03F7/004;G03F7/26;H01L21/027;(IPC1-7):G03C1/72 |
主分类号 |
G03C1/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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