发明名称 |
Probe apparatus with a swinging holder for an object of examination |
摘要 |
A probe apparatus which has a probe card having a plurality of probes, a wafer holder located above or beside the probe card, for holding a wafer to be examined, a tester head electrically connected to the probes of the probe card, a tester electrically connected to the tester head, for detecting electrical characteristics of the wafer from the data output from the wafer, and a CCD camera arranged to oppose the object, for detecting the position of the wafer.
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申请公布号 |
US5404111(A) |
申请公布日期 |
1995.04.04 |
申请号 |
US19930077392 |
申请日期 |
1993.06.17 |
申请人 |
TOKYO ELECTRON LIMITED;TOKYO ELECTRON YAMANASHI LIMITED |
发明人 |
MORI, SHIGEOKI;KARASAWA, WATARU;FUJIHARA, HITOSHI;SUZUKI, MASARU;YOKOTA, KEIICHI |
分类号 |
G01R1/073;G01R31/265;(IPC1-7):G01R31/02 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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