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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0786464(A)
申请公布日期
1995.03.31
申请号
JP19930189020
申请日期
1993.06.30
申请人
SONY CORP
发明人
AMAGASAKI YOSHIHIRO
分类号
H01L21/56;H01L23/29;H01L23/31;(IPC1-7):H01L23/29
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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