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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPH0786251(A)
申请公布日期
1995.03.31
申请号
JP19930231619
申请日期
1993.09.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUMOTO MITSUNORI
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
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地址
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