PROCESSING GAS SUPPLYING METHOD,申请号JP19930254686-传众专利搜索

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发明名称	PROCESSING GAS SUPPLYING METHOD
摘要
申请公布号	JPH0786172(A)	申请公布日期	1995.03.31
申请号	JP19930254686	申请日期	1993.09.17
申请人	TOKYO ELECTRON LTD	发明人	RI HIDEKI
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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