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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0786413(A)
申请公布日期
1995.03.31
申请号
JP19930228518
申请日期
1993.09.14
申请人
KAWASAKI STEEL CORP
发明人
AIZAWA TOMOYA;HAYASHI HIROYUKI
分类号
H01L27/118;H01L21/82;H01L21/822;H01L27/04;(IPC1-7):H01L21/82
主分类号
H01L27/118
代理机构
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