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发明名称
CHEMICAL VAPOR DEPOSITION SYSTEM
摘要
申请公布号
JPH0786178(A)
申请公布日期
1995.03.31
申请号
JP19930193955
申请日期
1993.07.09
申请人
TOSHIBA CERAMICS CO LTD;TOKUYAMA CERAMICS KK
发明人
SENSAI KOUJI;HOJO AKIMICHI;TAKAMURA KATSUYUKI
分类号
B05B1/14;C30B25/14;H01L21/205;(IPC1-7):H01L21/205
主分类号
B05B1/14
代理机构
代理人
主权项
地址
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