| 摘要 |
PURPOSE:To obtain a cylindrical laminated piezoelectric actuator which generates no scratch and deformation when the cylindrical laminated piezoelectric actuator, that is formed by piling up a green sheet made of piezoelectric ceramics material and an internal electrode, is baked at a high temperature, and is excellent in electrical insulation breakdown strength. CONSTITUTION:When the cylindrical laminated piezoelectric actuator 1 is baked at 1100 deg.C, a powder in which the particle diameter of initial powder is less than 1mum is added with a binder to form a green sheet, and a temperature between 400 deg.C and 500 deg.C is held for 100 hours or 200 hours, then a porous piezoelectric ceramics plate in which the binder is removed is crushed to obtain a powder A5 of 150mum or less in particle diameter. On the other hand, a ceramics plate which is sintered at 1100 deg.C is crushed to obtain a powder B6, and when the cylindrical laminated piezoelectric actuator is to be baked in a high temperature, the powder A is filled into the inside of inner diameter and the powder B is filled into the outer circumference, then the cylindrical laminated piezoelecrtric ceramics is buried. |
