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发明名称
METHOD FOR FORMING ALUMINUM-BASED METALLIC PATTERN
摘要
申请公布号
JPH0786255(A)
申请公布日期
1995.03.31
申请号
JP19930249809
申请日期
1993.09.10
申请人
SONY CORP
发明人
KAMIIDE KOYO
分类号
H01L21/28;C23F4/00;H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;H01L21/768;H01L23/52;(IPC1-7):H01L21/306
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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