| 摘要 |
PURPOSE:To provide a laminated actuator that provides displacement amount of high precision over a wide displacement range. CONSTITUTION:Relating to a laminated actuator l, a digital displacement element 20 which, consisting of an electric field excitation phase transition material, makes phase transition from anti-ferroelectric phase to ferroelectric phase due to electric field application, for a specified displacement amount to be caused, or a laminated digital displacement element 2 wherein the elements 20 are laminated in the direction of displacement, and arm analogue displacement element 3 which, consisting of a piezoelectric or electrostrictive material, can change at least to a specified displacement amount according to applied electric field, are laminated in the direction of displacement elements. |
