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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0786398(A)
申请公布日期
1995.03.31
申请号
JP19930228714
申请日期
1993.09.14
申请人
SHARP CORP
发明人
TOKUSHIGE NOBUAKI
分类号
H01L21/3213;H01L21/768;(IPC1-7):H01L21/768;H01L21/321
主分类号
H01L21/3213
代理机构
代理人
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