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发明名称
METHOD FOR REMOVING REACTION BYPRODUCT IN SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH0786265(A)
申请公布日期
1995.03.31
申请号
JP19930252526
申请日期
1993.09.14
申请人
KOKUSAI ELECTRIC CO LTD
发明人
SUZAKI KENICHI
分类号
H01L21/31;H01L21/22;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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