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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0786248(A)
申请公布日期
1995.03.31
申请号
JP19930230657
申请日期
1993.09.17
申请人
FUJITSU LTD
发明人
SAITO TOMIYASU
分类号
H01L21/027;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01L21/306
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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