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发明名称
PATTERN FORMATION
摘要
申请公布号
JPH0786147(A)
申请公布日期
1995.03.31
申请号
JP19930232622
申请日期
1993.09.20
申请人
FUJITSU LTD
发明人
TAKECHI SATOSHI
分类号
G03F7/11;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/11
代理机构
代理人
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