| 摘要 |
PURPOSE:To obtain the state of a specular surface, and to form optical an confinement structure on the surface of a glass substrate by ultrasonic-machining the surface of the glass substrate, transferring the shape of the machining surface of a tool and heating and melting the machining surface at a point close to a glass softening point. CONSTITUTION:A tool 2 with a plurality of continuous grooves or other three- dimensional-shaped projections is mounted on the machining surface of an ultrasonic horn. An ultrasonic vibrator 3 is driven, and the ultrasonic horn 1 and the tool 2 are given ultrasonic vibrations of 15-40KHz. The tool 2 is pushed against the surface of a glass substrate 4 while a section between the tool 2 and the glass substrate 4 is supplied with slurry containing the free abrasive grains 5 of gain size of 1000 (mean grain size of l0mum, maximum grain size of 30mum)-grain size of 8000 (mean grain size of 1mum, maximum grain size of 6mum). The surface of the glass substrate 4 is heated. Accordingly, a thin-film solar cell is formed onto the machining surface of the completed glass substrate 4. |
