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发明名称
BATCH PROCESSING SYSTEM AND CLEANING METHOD THEREFOR
摘要
申请公布号
JPH0786189(A)
申请公布日期
1995.03.31
申请号
JP19930254685
申请日期
1993.09.17
申请人
TOKYO ELECTRON LTD
发明人
RI HIDEKI
分类号
H01L21/205;C23C16/44;H01L21/285;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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