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发明名称
NONCONTACT-TYPE MEASURING APPARATUS FOR VOLTAGE
摘要
申请公布号
JPH0783965(A)
申请公布日期
1995.03.31
申请号
JP19930224851
申请日期
1993.09.10
申请人
NEC CORP
发明人
NISHIDA MASARU
分类号
G01R19/00;G01R31/302;H01L21/66;(IPC1-7):G01R19/00
主分类号
G01R19/00
代理机构
代理人
主权项
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