| 摘要 |
<p>PURPOSE:To provide a composite single-crystal piezoelectric substrate which is stable to the thermal changes and the mechanical vibrations, has a large freedom degree of constitution, and can facilitate its airtight sealing structure by directly joining a 1st single-crystal piezoelectric substrate made of a specific material to a 2nd single-crystal piezoelectric substrate via a metallic silicide layer. CONSTITUTION:A 1st single-crystal piezoelectric substrate 1 and a 2nd single- crystal piezoelectric substrate 2 are selected out of a group of crystal, lithium niobate, lithium tantalate and lithium borate. Both substrates 1 and 2 are directly joined together via a metallic silicide layer 3. The metallic silicides include cobalt, nickel, molybdenum, titanium, platinum, gold, gold-germanium mixed crystal, etc. These silicides have comparatively low electric resistance and can be applied to the electrodes or wiring. In such a constitution of a composite single-crystal piezoelectric substrate, the high stability is secured to the thermal changes and the mechanical vibrations, the freedom degree is increased for the constitution of an exciting electrode and the electrode lead-out constitution, no via hole is needed, and an airtight sealing structure is facilitated.</p> |
