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发明名称
METHOD OF MANUFACTURING THIN FILM TRANSISTOR
摘要
申请公布号
JPH0786303(A)
申请公布日期
1995.03.31
申请号
JP19930176102
申请日期
1993.06.22
申请人
CASIO COMPUT CO LTD
发明人
SHIODA JUNJI
分类号
H01L21/316;H01L21/336;H01L29/40;H01L29/786;(IPC1-7):H01L21/336;H01L29/784
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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