Position transmitter for registering the position of a light beam
摘要
The present invention relates to a position transmitter for registering the position of a light beam, having at least one group of photodiodes which are arranged adjacent to one another. The electrodes (13) of the photodiode structure are configured in a strip shape in such a manner that at least two, typically 5 to 10, strip-shaped electrodes of a photodiode structure are covered at least partially by the light beam or particle beam (20). An evaluation circuit measures the photocurrent or a correlated variable of the individual strip electrodes and specifies the position of the beam with reference to the photocurrent intensity distribution. <IMAGE>