发明名称 Position transmitter for registering the position of a light beam
摘要 The present invention relates to a position transmitter for registering the position of a light beam, having at least one group of photodiodes which are arranged adjacent to one another. The electrodes (13) of the photodiode structure are configured in a strip shape in such a manner that at least two, typically 5 to 10, strip-shaped electrodes of a photodiode structure are covered at least partially by the light beam or particle beam (20). An evaluation circuit measures the photocurrent or a correlated variable of the individual strip electrodes and specifies the position of the beam with reference to the photocurrent intensity distribution. <IMAGE>
申请公布号 DE4332859(A1) 申请公布日期 1995.03.30
申请号 DE19934332859 申请日期 1993.09.27
申请人 HEIMANN OPTOELECTRONICS GMBH, 65199 WIESBADEN, DE 发明人 HENNERICI, WOLFGANG, DR.RER.NAT., 55218 INGELHEIM, DE;BRUNST, GERHARD, DR.RER.NAT., 65232 TAUNUSSTEIN, DE;HOLZENKAEMPFER, ENNO, DR.RER.NAT., 65232 TAUNUSSTEIN, DE
分类号 G01B11/03;G01D5/26;H01L27/144;(IPC1-7):G05D3/12;H01L27/14 主分类号 G01B11/03
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