| 申请人 |
RIKAGAKU KENKYUSHO, WAKO, SAITAMA, JP;SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
YAMAGUCHI, ICHIROU, WAKO-SHI, SAITAMA 351-01, JP;SHIMADA, TADAKATSU, FINE FUNCTIONAL MATERIALS LAB., ANNAKA-SHI, GUNMA 379-01, JP;KOYA, KAZUO, FINE FUNCTIONAL MATERIALS LAB., ANNAKA-SHI, GUNMA 379-01, JP;SUZUKI, TOSHIYUKI, SHINETSU ENGINEERING CO., LTD., TOKYO 100, JP |
