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经营范围
发明名称
Nasschemische Strukturätzung von Silizium.
摘要
申请公布号
DE59008544(D1)
申请公布日期
1995.03.30
申请号
DE19905008544
申请日期
1990.09.28
申请人
SIEMENS SOLAR GMBH, 5060 BERGISCH GLADBACH, DE
发明人
HOLDERMANN, KONSTANTIN, DIPL.-CHEM.-ING., D-8875 OFFINGEN, DE
分类号
H01L21/306;H01L31/0236;(IPC1-7):H01L21/306;H01L31/023
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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