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发明名称
TWO-LEVEL MICROBRIDGE BOLOMETER IMAGING ARRAY AND METHOD OF MAKING SAME.
摘要
申请公布号
EP0645054(A1)
申请公布日期
1995.03.29
申请号
EP19920914216
申请日期
1992.06.11
申请人
HONEYWELL INC.
发明人
HIGASHI, ROBERT, E.;JOHNSON, ROBERT, G.;HOLMEN, JAMES, O.
分类号
G01J1/02;G01J5/02;G01J5/20;H01L21/822;H01L27/04;H01L27/16;H01L37/02;(IPC1-7):H01L31/08
主分类号
G01J1/02
代理机构
代理人
主权项
地址
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