Surface acoustic wave device using highly oriented diamond film

摘要

A surface acoustic wave device uses a highly oriented diamond film with a planar surface, increasing the propagating velocity of a surface acoustic wave, and fabricating many devices on a large area without polishing processes. The surface acoustic wave device includes the highly oriented diamond films, a piezoelectric film and electrodes which are formed on the diamond film. In the highly oriented diamond film, 80% or more of the surface area of the diamond film is composed of the (100) faces or (111) faces of diamond; and the difference { DELTA alpha , DELTA beta , DELTA gamma } between the Euler angles { alpha , beta , gamma } expressing the crystal orientations of the adjacent (100) or (111) faces of the diamond film simultaneously satisfies the relations of | DELTA alpha |