METHOD FOR PURIFYING GASEOUS HYDRIDE OR GAS OBTAINED BY DILUTING THE SAME

摘要

PURPOSE:To purify a gaseous hydride contg. gaseous oxygen and gaseous hydrogen sulfide as impurities or gas obtd. by diluting the gaseous hydride by simultaneously removing the gaseous oxygen and gaseous hydrogen sulfide from the gas to be purified. CONSTITUTION:A gaseous hydride contg. gaseous oxygen and gaseous hydrogen sulfide as impurities or gas obtd. by diluting the gaseous hydride with gas for dilution is passed through a column packed with an iron-based reacting agent to simultaneously remove the gaseous oxygen and gaseous hydrogen sulfide. A product obtd. by subjecting Fe2O3 to reduction treatment at, 300 deg.C in gaseous hydrogen is used as the iron-based reacting agent.