Checking that the diffusion ovens used in the fabrication of semiconductor devices are closed,申请号IT1991VA00014-传众专利搜索

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发明名称	Checking that the diffusion ovens used in the fabrication of semiconductor devices are closed
摘要
申请公布号	IT1249811(B)	申请公布日期	1995.03.28
申请号	IT1991VA00014	申请日期	1991.05.28
申请人	SGS THOMSON MICROELECTRONICS S.R.L.	发明人	MERLOTTI MAURO
分类号	G05G;(IPC1-7):G05G	主分类号	G05G
代理机构		代理人
主权项
地址

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