发明名称 |
APPARATUS FOR COATING A SUBSTRATE |
摘要 |
A coating applicator is provided for depositing a film on a surface of glass (12) and other substrates by chemical vapor deposition. The applicator includes a pair of opposing coating nozzles (10a and 10b) for applying a vaporized coating chemical reactant in a carrier gas to the surface at such a concentration and velocity that coating of the surface is achieved under substantially reaction rate controlled conditions. Each coating nozzle (10a and 10b is positioned adjacent the surface (12) with a small clearance (C) therebetween which is open to the outside atmosphere. The opposing coating nozzles are directed toward each other at a selected angle with respect to a normal to the surface (12) of the substrate. The angle and the clearance provides a condition where there is substantially no intermixing of coating vapors with the outside atmosphere.
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申请公布号 |
CA1334910(C) |
申请公布日期 |
1995.03.28 |
申请号 |
CA19880568829 |
申请日期 |
1988.06.07 |
申请人 |
ATOCHEM NORTH AMERICA, INC. |
发明人 |
LINDNER, GEORG H. |
分类号 |
C03C17/245;C03C17/00;C23C16/44;C23C16/455;C23C16/54;(IPC1-7):C03C17/00 |
主分类号 |
C03C17/245 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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