| 摘要 |
<p>PURPOSE:To reduce the number of part items for the purpose of compactness, facilitate manufacturing and dimensional management and provide a turbo vacuum pump having small performance fluctuation by forming cooling passages over the whole circumferences of a pump stator and a motor casing, respectively. CONSTITUTION:When a pump unit is driven by a motor unit comprising a coil 7a and a stator 7b, air which is sucked from an intake port 5 is compressed through a groove pump stage constituted of a rotor 1 and an intake casing 4 and a vortex pump stage constituted of the rotor 1 and the stator 2, and then, is exhausted through an exhaust port 8. In the vortex pump stage, the air flows through the intake port 12 and is exhausted toward the radial direction by a vortex blade 9 which rotates at a high speed, to flow inside a ventilation path 10 in a spiral manner, and then, is exhausted through the exhaust port 13. Consequently, the rotor 1 and the stator 2 are formed integrally with each other, thus achieving cost reduction. Moreover, if the rotor 1 and the stator 2 are inserted or drawn in the axial direction for assembling or disassembling, an assembling time can be shortened and assembling precision can be enhanced.</p> |
