| 发明名称 |
Method for manufacturing superconducting patterns |
| 摘要 |
A manufacturing method of Josephson devices is described. A superconducting ceramic film is deposited on a non-conductive surface and partly spoiled in order to form a barrier film by which two superconducting regions is separated. The spoiling is performed by adding a spoiling element into the ceramic film by ion implantation.
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| 申请公布号 |
US5401716(A) |
申请公布日期 |
1995.03.28 |
| 申请号 |
US19920829531 |
申请日期 |
1992.02.03 |
| 申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI, SHUNPEI |
| 分类号 |
H01L39/12;H01L39/22;H01L39/24;(IPC1-7):B05D5/12;B05D3/06 |
主分类号 |
H01L39/12 |
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