Verfahren zur Herstellung einer Halbleiteranordnung.,申请号DE1990616955-传众专利搜索

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发明名称	Verfahren zur Herstellung einer Halbleiteranordnung.
摘要
申请公布号	DE69016955(D1)	申请公布日期	1995.03.23
申请号	DE1990616955	申请日期	1990.12.03
申请人	KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP	发明人	SHINADA, KAZUYOSHI, C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP;YOSHIDA, MASAYUKI, C/O INTELLECTUAL PROPERTYDIV., MINATO-KU, TOKYO 105, JP;MIZUTANI, TAKAHIDE, C/O INTELLECTUAL PROPERTYDIV., MINATO-KU, TOKYO 105, JP;HANADA, NAOKI, C/O INTELLECTUAL PROPERTY DIVISION, MINATO-KU, TOKYO 105, JP
分类号	H01L21/82;H01L21/8234;H01L21/8247;H01L27/088;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/82	主分类号	H01L21/82
代理机构		代理人
主权项
地址

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