Method and device for coating the inner walls of hollow bodies (cavities), in particular of small dimensions,申请号DE19934339490-传众专利搜索

发明名称	Method and device for coating the inner walls of hollow bodies (cavities), in particular of small dimensions
摘要	The invention relates to a method for coating the inner walls of hollow bodies, in particular of small dimensions, in which the coating of the inner walls is carried out by means of PLD (Pulsed Laser Deposition), and to a device for carrying out this method.
申请公布号	DE4339490(C1)	申请公布日期	1995.03.23
申请号	DE19934339490	申请日期	1993.11.19
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE;MAT GMBH DRESDEN, 01257 DRESDEN, DE	发明人	DIETSCH, REINER, DIPL.-PHYS., 01187 DRESDEN, DE;MAI, HERMANN, DR.HABIL., 01067 DRESDEN, DE;MUCHA, ANDREAS, DR.RER.NAT., 01728 BANNEWITZ, DE
分类号	C23C14/04;C23C14/28;(IPC1-7):C23C14/28	主分类号	C23C14/04
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