Direkt angetriebenes Servoventil, Druckmittel-Servoeinrichtung und Steuerungsverfahren für das direktangetriebene Servoventil.

摘要

The present invention is intended to provide a direct-operated servo valve which exhibits stable damping characteristics. The servo valve according to the present invention is characterized in that a viscous fluid (30) is charged in the gap between a stator (3, 18; 37, 38; 41, 42) and a movable element (6; 36; 40), and is arranged to detect the velocity of a valve member (1), feed back the velocity signal (28) obtained by this detection, and damp the motion of the valve member.