| 摘要 |
<p>In a wafer stepper for fabricating semiconductor ICs (Integrated Circuits), a glass substrate (31) carries thereon a plurality of octagonal patterns (36) formed of a transmissive material. With such a glass substrate (31), the stepper diffracts light not only in X and Y directions but also in 45 DEG directions and 135 DEG directions. A mask pattern (7,8) is transferred to a wafer (40) with enhanced resolution and depth of focus. <IMAGE></p> |
