Method of cleaning semiconductor wafers using mixer and its arrangement.,申请号EP19920101278-传众专利搜索

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发明名称	Method of cleaning semiconductor wafers using mixer and its arrangement.
摘要
申请公布号	EP0497247(B1)	申请公布日期	1995.03.22
申请号	EP19920101278	申请日期	1992.01.27
申请人	KABUSHIKI KAISHA TOSHIBA	发明人	MASHIMO, NORIYOSHI, C/O INTEL. PROPERTY DIV.;OKUMURA, KATSUYA, C/O INTEL. PROPERTY DIV.
分类号	B08B3/08;B08B9/02;H01L21/00;(IPC1-7):H01L21/00	主分类号	B08B3/08
代理机构		代理人
主权项
地址

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