Surface wave filter element and method for manufacturing it.
摘要
<p>There are provided a surface wave filter element basically comprised of a portion on which elastic surface waves propagate constituted by a piezoelectric film a boron layer and IDT electrodes for inputting and outputting signals and a method for manufacturing the same. The piezoelectric film is a film made of ZnO, LiNbO3 or LiTaO3 formed using sputtering, ion beam deposition or CVD. The boron layer is a boron film formed on a boron plate or a substrate made of an inorganic material. The boron film is formed using electron beam deposition , ion beam deposition or CVD. <IMAGE></p>
