发明名称 Flowmeter sensor
摘要 A flowmeter sensor includes a sensor tube, and a heater/resistor through which the sensor tube passes. The heater/resistor includes a substantially cylindrical sleeve fitted around the sensor tube and made of ceramic. A thin film of platinum is deposited on the sleeve and is then partially removed by a laser to provide a helical resistance pattern. A pair of electrically conductive rings are tightly fitted around opposite ends of the ceramic sleeve and serve as bases to be connected with a corresponding pair of leads.
申请公布号 US5398549(A) 申请公布日期 1995.03.21
申请号 US19920897796 申请日期 1992.06.12
申请人 MKS JAPAN, INC. 发明人 SUZUKI, ISAO
分类号 G01F1/68;G01F1/684;G01F1/692;(IPC1-7):G01F1/68 主分类号 G01F1/68
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