发明名称 Substrate having a built-in capacitor and process for producing the same
摘要 In a substrate having built-in capacitor which is incorporated in and united with an insulator, the capacitor has a dielectric layer made of a silicon nitride-based ceramic containing silicon carbide in an amount of from 13 to 30% by weight.
申请公布号 US5400210(A) 申请公布日期 1995.03.21
申请号 US19930080107 申请日期 1993.06.23
申请人 NGK SPARK PLUG CO., LTD. 发明人 SUGIMOTO, NORIYASU;KIMURA, YUKIHIRO;SETO, MASAHARU
分类号 H01B3/12;H01G4/08;H01G4/12;H01L23/12;H01L23/15;H05K1/16;H05K3/46;(IPC1-7):H01G4/10 主分类号 H01B3/12
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