| 摘要 |
<p>PURPOSE:To provide an aromatic aligning device for semiconductor wafers in which wafers for dicing can be efficiently aligned with high precision. CONSTITUTION:While a wafer 16 is carried into this device and moved from the right to the left in the figure, the image of the wafer is taken with three cameras of different magnifications which are a macrocamera 20, semi- macrocamera 26 and microcamera 28, and aligned in each step according to the precision of the respective camera. In the macroalignment step, the wafer is aligned as a whole shape, in the semi-macroalignment step, the nearest grid from the center of the veiw field of the camera is aligned to the center of the camera and the address of each grid is specified. In the microalignment step, one grid is aligned. By successively increasing the magnification for alignment, the efficient and precise alignment can be done.</p> |
