PANEL POSITIONING DEVICE

摘要

PURPOSE:To increase the precision of positioning even when the precision of a mark for positioning is insufficient. CONSTITUTION:Panels 2 and 3 are each provided with >=3 marks for positioning and the position recognizing means consisting of a visual recognition camera 1 and a visual recognition part 9 find data on the positions of the respective marks before the opposite panels 2 and 3 are positioned; and a feed quantity arithmetic means 10 finds the relative displacement between the panels 2 and 3 which is required to put the corresponding marks right one over the other respectively from the position data on the respective marks and determines relative displacement so that the sum of squares of errors between the marks becomes minimum. This relative displacement is supplied to the panel 3 through a positioning table 8 to position the panels.