| 摘要 |
<p>PURPOSE:To reduce the cost of production by constituting terminals of aluminum films which constitute signal lines, chromium thin films which are formed thereon and transparent conductive films which are formed on the chromium thin films and constitute pixel electrodes. CONSTITUTION:The gate terminal GTM is constituted of the aluminum film g1, the chromium thin film g2 which is formed on the aluminum film g1 and has a film thickness of <=100Angstrom and the transparent conductive film d1 which is formed on the chromium thin film g2 and constitute the pixel electrode. Since a conductive film to constitute only the gate terminal GTM is not formed in such a manner, there is no need for forming and patterning the conductive film constituting only the gate terminal TGM and, therefore, the production stages are simplified and the yield is improved. Al2O3 film which is an insulating film is not produced if the chromium thin film g2 is disposed between the aluminum film g1 and the transparent conductive film d1 and, therefore, the resistance between the aluminum film g1 and the transparent conductive film d1 decreases.</p> |
