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发明名称	FORMATION OF PATTERN
摘要
申请公布号	JPH0778747(A)	申请公布日期	1995.03.20
申请号	JP19930222712	申请日期	1993.09.08
申请人	FUJITSU LTD	发明人	SAITO TOMIYASU
分类号	G03F7/11;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/11
代理机构		代理人
主权项
地址

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