SUBSTRATE TRANSFER DEVICE

摘要

PURPOSE:To eliminate any exclusive positioning parts for miniaturizing the whole device by a method wherein either one of the first and second positioning guides is displaceably arranged far and near in the opposite direction while a substrate held and positioned by the first and second positioning guides is mounted and held by the second substrate transfer arm. CONSTITUTION:The first substrate transfer arm 19 is shifted to the second substrate transfer arm 38 side to press down the peripheral end face of a substrate W by the first positioning guide 18 for abutting on the substrate W against the second positioning guide 39 so that the substrate W may be held by the first and second positioning guides 18 and 39 to be positioned for centering the substrate W. Next, the second substrate transfer arm 38 sucks at the substrate W and then the first substrate transfer arm 19 is lowered at the stand-by position lower than the second substrate transfer arm 38 so as to complete the delivery shifting work of the substrate W from the first substrate transfer arm 19 to the second substrate transfer arm 38. Through these procedures, the exclusive positioning parts can be eliminated thereby enabling the whole device to be miniaturized.