摘要 |
PURPOSE:To provide a method and an apparatus for separating high purity argon in which a structure of the apparatus is simplified, purity of argon to be collected is enhanced and yield is improved when the high purity argon is separated and collected by liquefying fractionating separation. CONSTITUTION:Crude argon introduced from a crude argon tower 3 is first introduced into a denitrification tower 55 to fractionate to separate nitrogen, and then introduced to a deoxygenation tower 64 to fractionate to separate oxygen. In this case, high purity argon separated from a top of the tower is collected from a tube 78.
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