| 摘要 |
<p>PURPOSE: To provide a new valve device for exactly changing flow rate. CONSTITUTION: This valve device is provided with plural binary control ducts 12-18, one analog control duct 50 and controller 58. The binary control ducts 12-18 are mutually parallelly connected and have binary valves 24-30 and regulating means 42-48 for passing the prescribed flow rate of fluid to a common outlet. The prescribed flow rate of the respective binary control ducts 12-18 is selected so as to successively increase the flow rate of an entire fluid stream through incrementation including the maximum incrementation while separating or combining the successively selected binary control ducts.</p> |
