| 摘要 |
PURPOSE:To enable an SR-X ray magnifying mirror to be very accurately and quickly controlled in attitude. CONSTITUTION:An SR-X ray L1 is made to irradiate t,he reflecting surface R1 of an magnifying mirror M1, and the intensity distribution of reflected X-rays is detected by a detection equipment 10 composed of a pair of CCD units 10a disposed separate from each other across the optical path of the reflected light. The detection equipment 10 detects the inclination angle of the reflecting surface R1 of the magnifying mirror M1 basing on the outputs of the CCD units 10a, and a tilt stage 3 or a vacuum chamber 1 is controlled in rotation angle basing on the output of the detection equipment 10. |
